Primary Current Distribution Model for Electrochemical Etching of Silicon through a Circular Opening
A. Ivanov , U. Mescheder ,
 Hochschule Furtwangen University, Furtwangen im Schwarzwald, Germany
Primary current distribution model for anodization of low-doped p-type silicon through a circular opening in frontside insulating mask is developed. The model is applied in two regimes of the process – pore formation and electropolishing – by definition of current density dependent functions of porosity and dissolution valence based on experimental results. As found also experimentally, ...
N. Bhalla, S. Li, and D. Chung
Chung Yuan Christian University, Taiwan, (R.O.C)
National Tsing Hua University, Taiwan, (R.O.C)
Different configurations of MEMS based accelerometer has been made and analysed using COMSOL Multiphysics. The designs presented in this paper consist of a square shaped proof mass with flexures supporting it. Different position and varied number of supporting flexures attached to the proof mass makes each configuration distinct. The piezoresistors are placed near the proof mass and frame ends ...
D. Chauhan, B. D. Pant
Kurukshetra University, Kurukshetra, Haryana, India
CSIR- Central Electronics Engineering Research Institute, Pilani, Rajasthan, India
Load cells are force sensors, which are used in weighing equipment. The objective of this work is to develop MEMS based load cell. In this work two different load cell designs were simulated. First design is based on compressing a meander like polysilicon strain gage for the measurement of high forces up to 10kN. Second design is based on MEMS pressure sensor consisting of membrane, on which ...
M. Kaushik , S. Katti , V. Saradesai , P. Naragund , P. Vidhyashree , A. K. V. Nandi 
 B.V. Bhoomaraddi College of Engineering and Technology, Hubli, India
This article describes the design of MEMS based cantilever structure intended for determination of blood group and it is compared with manual method. Cantilever structure design has a sensing layer and when a blood sample comes in contact with this, results in coagulation. The surface tension in turn occurs due to chemical and biological reactions of antigen and antibodies resulting in ...
B. Cahill, A. Giannitsis, G. Gastrock, M. Min[1,2], and D. Beckmann
Institut für Bioprozess- und Analysenmesstechnik e.V., Heiligenstadt, Germany
 Department of Electronics, Tallinn University of Technology, Tallinn, Estonia
Electrowetting occurs with the electrical control of the surface wetting properties through the application of an electric potential. A simulation of electrowetting driven droplet dynamics is performed using the COMSOL Multiphysics level-set method for a sessile droplet and for a droplet in a microchannel. The response of the drop to a step voltage is studied. The contact angle at one edge of ...
T. Desai , R. Dudhe , S. Ayyalusamy ,
 Manipal University, Dubai, UAE
Piezoelectric energy conversion has received great attention for vibration-to-electric energy conversion over the last five years. A typical piezoelectric energy harvester is a unimorph or a bimorph cantilever located on a vibrating host structure, to generate electrical energy from base excitations. In this paper we have optimized the dimensions of the proof mass and the bimorph piezoelectric ...
COMSOL Multiphysics® Based Identification of Thermal Properties of Mesoporous Silicon by Pulsed Photothermal Method - new
N. Semmar, I. El Abdouni, A. Melhem
GREMI-UMR7344, CNRS/University of Orléans, Orléans, France
The silicon is mainly known under its single-crystal shape and polycrystalline. Since a few decades, a new type of morphology is developed: the porous silicon (p-Si). Meso-porous silicon (Mp-Si) is one of promising materials for future microelectronic chips multi-functionalization systems, and for micro-sensing devices. For thermal properties investigation many experimental systems were ...
S. Dixit, R. C. Jain
Jaypee Institute of Information Technology, Noida, Uttar Pradesh, India
Surface Acoustic Waves (SAW) is the acoustic wave that propagates along the surface of the substrate with amplitude decaying exponentially away from the surface. A basic SAW device consists of two IDT’s on a piezoelectric substrate such as quartz. Surface Acoustic Wave can be generated by application of a voltage to an IDT deposited on the surface of a piezoelectric substrate. The ...
V. Longinotti, S. Di Marco, S. Pistilli, F. Costa, M. Giusti, G. Gammariello, I. Gison, G. Latessa[1,2], D. Mascolo, A. Buosciolo
Altran Italia, Roma, Italy
Consorzio DeltaTi Research, Milano, Italy
The main topic of this paper is the development of an innovative tool that can be applied in a wide range of complex problems, to simulate, optimize and improve system design especially when dealing with huge numbers of parameters and constraints. The new methodology is obtained by joining the power of COMSOL Muliphysics® simulation with the modern optimization approach of genetic algorithms. ...
N. Gouthami, D. Parthiban, M. Alagappan, and G. Anju
PSG College of Technology
Tamil Nadu, India
The objective of this paper is to design a 3D Gas Sensor for sensing Hydrogen gas and to increase the conductivity at nano level. In this novel design, nanorods act as the sensing layer. The sensitivity towards gas adsorption is found to be increased due to its high surface to volume ratio. The total displacement and voltage on intermediate layer after gas adsorption will be changing by varying ...