R. Berthelon , D. Dutartre , F. Andrieu 
 STMicroelectronics, France
 CEA Leti, France
The integration of high level of stress in field effect transistors is performed through incorporation of intrinsically strained SiGe layers. With the help of COMSOL simulations, we performed two studies addressing the level of stress in the area of interest. In the first case, we analyzed the geometric effects of the SiGe film stress relaxation on the edges. In a second time, we studied the ...
M. Maitra , H. B. Nemade , S. Kundu ,
 Indian Institute of Technology Guwahati, Guwahati, Assam, India
The objective of this paper is to show the simulation of a piezoelectric thin film device and its application as a sensor. Piezoelectric aluminum nitride thin film clamped at two ends is simulated using COMSOL Multiphysics software. The device consists of the piezoelectric thin film suspended on a cavity etched on a silicon substrate. Two metal electrodes are placed at the two fixed sides of the ...
L. Moro, F. Lugli, and F. Zerbetto
Department of Chemistry “G. Ciamician”, Università di Bologna, Bologna, Italy
Rotaxanes are a class of molecules recently developed in laboratory that have been heralded as possible molecular motors. The motor is constituted by a linear molecule (thread) and a ring-shaped molecule (macrocycle), which is free to move along the thread, switching between two, or more, energetically stable interaction points (stations). Molecular motors start their functioning far from ...
I.M. Abdel-Motaleb, K. Allen 
Department of Electrical Engineering, Northern Illinois University, DeKalb, IL, USA
The design of a RFID-enabled temperature sensor is described in this paper. In this sensor, a change in temperature causes structural beams to bend, which results in a proportional displacement of the plates of the capacitor. Plates\' displacement results, in turn, in changing the value of its capacitance. The capacitor of the sensor is coupled to the LC resonant network of a passive RFID tag. ...
S. N. Das, G. Bose
Centurion University of Technology and Managment, Jatani, Bhubaneswar, Orissa, India
Institute of Technical Education and Research, SOA University, Bhubaneswar, Orissa, India
This paper describes the characteristics of MEMS microchannel and various issues of its designing. Here the major parameters are pressure drop and heat transfer rate. Various structures are modeled and optimized to get a minimum pressure drop and maximum heat transfer rate. The simulation results provide the characterization for Temperature, Mass flow rate, Pressure drop and Reynolds number. ...
J. Liu , V. B. Chalivendra , C. Goldsmith , W. Huang ,
 Department of Mechanical Engineering, University of Massachusetts - Dartmouth, Dartmouth, MA, USA
 MEMtronics Corporation, Richardson, TX, USA
Radio frequency (RF) micro-electro mechanical system(MEMS) switch works in on/off modes controlled by electrostatic forces. In off mode, rough surfaces of electrodes come into a contact to shunt the RF signal. Surface contact area has been recognized as a key factor in RF MEMS performance and reliability. Multi scale regular-fractal structure is observed on MEMS surface. Nonlinear Structural ...
P. D. Hanasi, B. G. Sheeparamatti, B. B. Kirankumar
Basaveshwar Engineering College, Bagalkot, Karnataka, India
Micro cantilevers are the basic MEMS structures, which can be used both as sensors and actuators. The . The objective of this work is to study concept of pull-in voltage and how to reduce the same. Voltage is applied to upper cantilever beam and lower contact electrode is made as ground. By increasing common area between cantilever beam and contact electrode, and also by reducing thickness of ...
The Origin of Mass-change Sensitivity within Multi-layered, Non-uniform, Piezoelectrically-actuated Millimeter-sized Cantilever (PEMC) Biosensors: Vibrational Analysis through Experiment and Finite Element Modeling (FEM)
B.N. Johnson, and R. Mutharasan
Department of Chemical and Biological Engineering, Drexel University, Philadelphia, Pennsylvania, USA
A 3D finite element model (FEM) of the PEMC sensor was developed to characterize the modes of vibration that have demonstrated high sensitivity to mass-change in experimentally fabricated sensors. The fundamental bending mode of vibration and the 1st bending harmonic are predicted at 10.0 kHz and 86.8 kHz, respectively, within approximately 5 % of the experimentally measured resonances. The ...
V. S. Nagaraja, N. Suma, and S. L. Pinjare
Nitte Meenakshi Institute of Technology
The tunable capacitor (variable capacitor) is one of the most important and components in filters, Phase shifters, VCO etc. A tunable capacitor can also be built using electro – thermal actuating mechanism. Compared to electro static, tunable capacitors actuated by thermal actuators have several advantages like lower driving voltages. The performance of thermal actuator becomes a key factor ...
Optical and Electronic Materials Unit
National Institute for Materials Science
A single-crystal diamond NEMS switch was fabricated while batch production of SCD MEMS/NEMS structures were developed. The diamond NEMS switches exhibit high performance with respect to high controllability, high reproducibility, and good reliability. Modeling and simulations were made that were consistent with experiments.