Design and Development of Microsystems within a Corporate Research Environment by Utilizing Comsol Multiphysics
Corporate Research & Technologies
Alexander Frey received his M.A. degree from the University of Texas, Austin, in 1994, the Dipl. Phys. degree from the University of Wuerzburg, Germany in 1997 and the PhD from the Saarland University, Germany in 2010. In 1997 he joined Research Laboratories of Siemens working on the design of DRAM sensing circuits. In 1999 he joined Corporate Research, Infineon, Munich, Germany. He was engaged ...
In recent years, optical manipulation using optical radiation pressure has been widely studied. In this study, the radiation pressure exerted on various kinds of microscopic objects with different laser beams was evaluated by COMSOL Multiphysics software. By changing beam shapes, microscopic objects can be trapped and rotated. This paper is in Japanese.
V. S. Nagaraja, Ramanuja H. S., Deepak K, S. L. Pinjare
Electronics and Communication Engineering, Nitte Meenakshi Institute of Technology, Bangalore, Karnataka, India
In this work, a MEMS based condenser microphone [1,2] using Polyimide as the diaphragm has been designed. The microphone structure has a backplate placed on top of the diaphragm. The backplate and the diaphragm are made up of polyimide. The two polyimide plates are separated by air gap which is achieved by using Aluminium as a sacrificial layer in between, which is etched away to create the air ...
K. M. V. Swamy, B. G. Sheeparamatti, G. R. Prakash
Basaveshwara Engineering Collage, Bagalkot, Karnataka, India
This work presents the study of spiral RF MEMS switch which has low actuation voltage due to spiral structure. This work is inspired by the superior performance of electrostatic RF MEMS switches over the conventional state-of-the-art solid-state devices and the potential applications in communication field. The customary high actuation voltage limits the reliability and applications especially in ...
Finite Element Evaluation of Surface Acoustic Wave Reflection and Scattering from Topographic Irregularities Comparable with the Wavelength
S. Yankin[1,2], S. Suchkov, S. Nikitov[2,3], B. Sveshnikov, I. Shatrova 
Joint International Laboratory LICS/LEMAC, IEMN UMR CNRS 8520, EC Lille,Villeneuve d’Ascq, France
Saratov State University, Saratov, Russia
Institute of Radio-engineering and Electronics, Russian academy of Science, Moscow, Russia
Design of SAW devices needs the accurate study of the scattering fields, arising from the interaction of SAW with topographic irregularities. To solve this problem FE methods very perspective, because with its help one can take into account the actual geometry of the electrodes and reflectors. This work describes results of original time domain calculation of 2D SAW scattering fields in delay ...
Shambhu Singh, Dr. N N Sharma
Birla Institute of Technology and science, Pilani, Rajasthan, India
A solid state Piezoelectric Micro Machined Modal Gyroscope is a vibratory type of gyroscope which sense the motion by voltage induced due to Coriolis force. It utilizes natural frequency of the structure to maximize the displacements and hence maximizing the induced voltage signals for sensing.The mode suitable for gyroscopic motion is 9th mode, which was found to be vibrating at 350.217 kHz. A ...
Siram Sai Krishna, Nuti Venkata Subrahmanya Ayyappa Sai, Dr.K.Srinivasa Rao
Lakireddy Bali Reddy College of Engineering, Mylavaram, Andhra Pradesh, India
Professor & HOD, Dept. of Electronics and Instrumentation Engineering, Lakireddy Bali Reddy College of Engineering, Mylavaram, Andhra Pradesh, India
The Micro electro mechanical systems (MEMS) technology provides us a platform to interface between mechanical and electrical components. In this paper, we have designed MEMS accelerometer based on piezoelectric property, and simulated using COMSOL Multiphysics®. The design, which has PZT kept in the annular diaphragm, provides good sensitivity. When this accelerometer is subjected to stress ...
S. Harrison, M. Young, M. Hayne, P. D. Hodgson, R. J. Young, A. Strittmatter, A. Lenz, U. W. Pohl, D. Bimberg
Department of Physics, Lancaster University, Lancaster, UK
Institut für Festkörperphysik, Berlin, Germany
Low-dimensional semiconductor nanostructures, in which charge carriers are confined in a number of spatial dimensions, are the focus of much solid-state physics research, offering superior optical and electronic properties over their bulk counterparts. Both two-dimensional (2D) and zero-dimensional (0D) structures have seen wide-ranging applications in laser diodes, solar cells and LEDs to name ...
Minhee Jun, and Jason V. Clark
Departments of Electrical and Computer Engineering, Purdue University, West Lafayette, IN, USA
Large deflection actuators are becoming increasingly important for microsystems. Since actuation forces are usually small, large deflection actuators usually require flexures with low stiffness. Rectangular serpentine flexures are often used for such actuators due to their low stiffness and large linear deflection range. In this paper we investigate the performance of curved serpentine flexures ...
A. Ricci, E. Giuri, and C. Ricciardi
Microcantilevers made of crystal silicon are probably the most diffused type of MEMS because of their simple fabrication and their vast applications. In this presentation we treat the mechanical behaviour of silicon mirocantilevers, and also give an overview of the many application areas that these apply to.