Dipolar Microwave Plasma Source
Application ID: 10512
This model presents a 2D axisymmetric dipolar microwave plasma source sustained through resonant heating of the electrons. This is known as electron cyclotron resonance (ECR), which occurs when a suitable high magnetic flux density is present along with the microwaves.
This is an advanced model that showcases many of the features that make COMSOL unique, including:
- Infinite elements for the magnetostatic model.
- Functional-based mesh adaption to create a fine mesh on the ECR surface.
- PMLs for the electromagnetic waves to represent
- Degrees of freedom for all 3 components of the high-frequency electric field despite the fact that the problem is geometrically axisymmetric.
- Full anisotropic tensors for the plasma conductivity and charged particle transport properties.
- Resonant power absorption in the ECR surface by the electrons.
- Equation-based modeling using integrated quantities to fix the total absorbed power.
- Solver sequencing to first compute the static magnetic field, then solve for all the plasma components.