Hybrid Modeling of a DC Magnetron Plasma Discharge

S.D. Ekpe[1], F. Jimenez[2], and S.K. Dew[2]
University of Alberta, Edmonton

This work is focused on the coupling of a Monte Carlo code with COMSOL Multiphysics conduction/convection, and electrostatic modules in solving fluid-Poisson model for the plasma properties for a practical DC magnetron low pressure plasma discharge.

The magnetostatic module was used in calculating the required magnetic field.

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