The Application Gallery features COMSOL Multiphysics® tutorial and demo app files pertinent to the electrical, structural, acoustics, fluid, heat, and chemical disciplines. You can use these examples as a starting point for your own simulation work by downloading the tutorial model or demo app file and its accompanying instructions.

Search for tutorials and apps relevant to your area of expertise via the Quick Search feature. Note that many of the examples featured here can also be accessed via the Application Libraries that are built into the COMSOL Multiphysics® software and available from the File menu.

Molecular Flow Modulex

Ultrahigh Vacuum, Chemical Vapor Deposition

Chemical vapor deposition (CVD) is a process often used in the semiconductor industry to grow layers of high-purity solid material on top of a wafer substrate. CVD is achieved using many different techniques and across a range of pressures from atmospheric to ultrahigh vacuum (UHV/CVD). ... Read More

Evaporator

This model shows how to compute the thickness of a thermally evaporated gold film. The thickness of the deposited film is computed both on the walls of the chamber and on the sample. Read More

Molecular Flow in an Ion-Implant Vacuum System

The Ion Implanter Evaluator app considers the design of an ion implantation system. Ion implantation is used extensively in the semiconductor industry to implant dopants into wafers. Within an ion implanter, ions generated within an ion source are accelerated by an electric field to ... Read More

Differential Pumping

Differentially pumped vacuum systems use a small orifice or tube to connect two parts of a vacuum system that are at very different pressures. Such systems are necessary when processes run at higher pressures and are monitored by detectors that require UHV for operation. In this model, ... Read More

Molecular Flow Through an S-Bend

This model computes the transmission probability through an s-bend geometry using both the angular coefficient method available in the Free Molecular Flow interface and a Monte Carlo method using the Mathematical Particle Tracing interface. The computed transmission probability by the ... Read More

Rotating Plate in a Unidirectional Molecular Flow

This model computes the particle flux, number density and pressure on the surface of a plate that rotates in a highly directional molecular flow. The results obtained are compared with those from other, approximate, techniques for computing molecular flows. Read More

Molecular Flow Through an RF Coupler

This model computes the transmission probability through an RF coupler using both the angular coefficient method available in the Free Molecular Flow interface and a Monte Carlo method using the Mathematical Particle Tracing interface. The computed transmission probability determined by ... Read More

Adsorption and Desorption of Water in a Load Lock Vacuum System

This model shows how to simulate the time-dependent adsorption and desorption of water in a vacuum system at low pressures. The water is introduced into the system when a gate valve to a load lock is opened and the subsequent migration and pumping of the water is modeled. Read More

Neutralization of a Proton Beam Through a Charge Exchange Cell

Gas cells have several applications in the design of scientific instruments. A gas cell is used to define a high-pressure region within the instrument's main vacuum system. For example, in this application, note we are designing a high-pressure region 100 mm long, with an operating ... Read More

Outgassing Pipes

This benchmark model computes the pressure in a system of outgassing pipes with a high aspect ratio. The results are compared with a 1D simulation and a Monte-Carlo simulation of the same system from the literature. Read More

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