Simulation of a One-Port SAW Resonator using COMSOL Multiphysics
R. Krishnan, H.B. Nemade, and R. Paily
Indian Institute of Technology, Guwahati
Sequence of wave traveling over the substrate
In this paper, we discuss simulation of one-port Surface Acoustic Wave (SAW) resonators using COMSOL Multiphysics.
Resonator action can be achieved in one of the two ways; a single Inter-digital Transducer (IDT) having several fingers over a piezoelectric substrate or a short IDT with reflecting gratings at the ends of the IDT.
We have modeled a Rayleigh wave type SAW device choosing YZ Lithium Niobate as the substrate and aluminum metal electrodes as the IDT.